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Vibration isolation table for FA (Factory Automation)

Vibration isolation table for FA (Factory Automation)

The introduction of air spring-type vibration isolation devices, which have been difficult in the FA industry until now, has become possible. We have developed a rapid air supply and exhaust mechanism. Achieving a high takt time of 1.5 seconds for air ON and less than 1 second for OFF! It can be smoothly transitioned to a vibration isolation structure using a solenoid valve. (Air ON: 3mm lift: can be used in conjunction with lifting functions) Thanks to our uniquely developed mechanism, we have achieved a positional reproducibility of ±0.5mm: less than 0.1mm (ON: OFF) with high precision in the XYZ directions!

  • Other processing machines
  • Semiconductor inspection/test equipment
  • Microscope

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